Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802395 | Lithographic mask, a pellicle therein and method of forming the same | Ching-Yueh Chen | 2020-10-13 |
| 10698313 | Apparatus and method for developing a photoresist coated substrate | Chun-Lang Chen, Ching-Yueh Chen | 2020-06-30 |