Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802395 | Lithographic mask, a pellicle therein and method of forming the same | Tzung-Shiun Liu | 2020-10-13 |
| 10788764 | Apparatus and a method of forming a particle shield | Wen-Hao Cheng, Chue-San Yoo | 2020-09-29 |
| 10698313 | Apparatus and method for developing a photoresist coated substrate | Tzung-Shiun Liu, Chun-Lang Chen | 2020-06-30 |