Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854433 | In-situ real-time plasma chamber condition monitoring | Sidda Reddy Kurakula | 2020-12-01 |
| 10665457 | Method of forming an integrated circuit using a patterned mask layer | Ming-Ching Chang, Chun-Hung Lee, Yih-Ann Lin, De-Fang Chen, Chao-Cheng Chen | 2020-05-26 |