Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10864530 | Coating apparatus and method of forming coating film | Lan-Hai Wang, Yong-Hung Yang, Ding-I Liu, Po-Hsiung Leu, Mao-Cheng Lin | 2020-12-15 |
| 10867787 | Method for controlling plasma in semiconductor fabrication | Cheng-Tsung Wu, Po-Hsiung Leu, Ding-I Liu, Hsiang-Sheng Kung | 2020-12-15 |
| 10724140 | Thermal chemical vapor deposition system and operating method thereof | Yen-Chan Lo, Yi-Fang Lai, Po-Hsiung Leu, Ding-I Liu, Kai-Shiung Hsu +4 more | 2020-07-28 |