Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10864530 | Coating apparatus and method of forming coating film | Lan-Hai Wang, Yong-Hung Yang, Ding-I Liu, Si-Wen Liao, Mao-Cheng Lin | 2020-12-15 |
| 10867787 | Method for controlling plasma in semiconductor fabrication | Cheng-Tsung Wu, Ding-I Liu, Si-Wen Liao, Hsiang-Sheng Kung | 2020-12-15 |
| 10867838 | Semiconductor device having a shallow trench isolation structure and methods of forming the same | Chun-Li Lin, Yl-Fang Li, Geng-Shuoh Chang, Chun-Sheng Wu, Ding-I Liu | 2020-12-15 |
| 10724140 | Thermal chemical vapor deposition system and operating method thereof | Yen-Chan Lo, Yi-Fang Lai, Ding-I Liu, Si-Wen Liao, Kai-Shiung Hsu +4 more | 2020-07-28 |
| 10626499 | Deposition device structure | Yen-Chan Lo, Huan-Chieh Chen, Yi-Fang Lai, Keith Kuang-Kuo Koai, Chin-Feng Sun +2 more | 2020-04-21 |
| 10533252 | Showerhead, semicondcutor processing apparatus having the same and semiconductor process | Chih-Chiang Chiu, Ding-I Liu, Chin-Feng Lin | 2020-01-14 |