Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859908 | Method to fabricate mask-pellicle system | Chun-Hao Tseng, Yuan-Chih Chu | 2020-12-08 |
| 10845342 | Acoustic measurement of film thickness | Jun DENG, Kuan-Wen Lin, Yu-Ching Lee | 2020-11-24 |
| 10794872 | Acoustic measurement of fabrication equipment clearance | Jun DENG, Kuan-Wen Lin, Yu-Ching Lee | 2020-10-06 |
| 10691017 | Pellicle for advanced lithography | Yu-Ching Lee, Ching-Fang Yu, Chun-Hung Lin, Ting-Hao Hsu, Ching-Hsiang Chang | 2020-06-23 |