Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845342 | Acoustic measurement of film thickness | Kuan-Wen Lin, Sheng-Chi Chin, Yu-Ching Lee | 2020-11-24 |
| 10794872 | Acoustic measurement of fabrication equipment clearance | Kuan-Wen Lin, Sheng-Chi Chin, Yu-Ching Lee | 2020-10-06 |