Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727118 | Method for manufacturing semiconductor device and pre-clean apparatus for semiconductor device | Jung-Tang Wu, Pei-Hsuan Lee, Szu-Hua Wu, Chih-Chien Chi | 2020-07-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727118 | Method for manufacturing semiconductor device and pre-clean apparatus for semiconductor device | Jung-Tang Wu, Pei-Hsuan Lee, Szu-Hua Wu, Chih-Chien Chi | 2020-07-28 |