Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10663868 | Method and apparatus for dynamic lithographic exposure | De-Fang Huang, De-Chen Tseng, Jia-Feng Chang, Li-Fang Hsu | 2020-05-26 |
| 10649336 | Method and system for fabricating semiconductor device | Chang-Fa Lin, Ching-Hung Cheng, Yi-Chuan Lo, Ming-Hsuan Chuang | 2020-05-12 |