Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10663868 | Method and apparatus for dynamic lithographic exposure | Jun-Yih Yu, De-Fang Huang, Jia-Feng Chang, Li-Fang Hsu | 2020-05-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10663868 | Method and apparatus for dynamic lithographic exposure | Jun-Yih Yu, De-Fang Huang, Jia-Feng Chang, Li-Fang Hsu | 2020-05-26 |