Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871720 | Apparatus for supporting a semiconductor wafer and method of vibrating a semiconductor wafer | Astha Sharma, Chia-Hung Lai, Hsin-Kuo Chang, Hong-Hsing Chou | 2020-12-22 |