Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871720 | Apparatus for supporting a semiconductor wafer and method of vibrating a semiconductor wafer | Astha Sharma, Hsin-Kuo Chang, Jaw-Lih Shih, Hong-Hsing Chou | 2020-12-22 |
| 10699938 | Shallow trench isolation structure and method of forming the same | Yen-Bin Huang, Chien-Mao Chen, Yu-Hsuan Kuo, Shih-Kai Fan, Kang-Min Kuo | 2020-06-30 |