Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879052 | Plasma processing apparatus and manufacturing method using the same | — | 2020-12-29 |
| 10872760 | Cluster tool and manufacuturing method of semiconductor structure using the same | — | 2020-12-22 |
| 10872788 | Wet etch apparatus and method for using the same | Hong Lu | 2020-12-22 |
| 10784114 | Methods of enhancing surface topography on a substrate for inspection | Jun Liu, Chun-Chih Lin | 2020-09-22 |