Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10864612 | Polishing pad and method of using | Jung-Yu Li, Sheng-Chen Wang, Shih-Sian HUANG | 2020-12-15 |
| 10675732 | Apparatus and method for CMP pad conditioning | Sheng-Chen Wang | 2020-06-09 |