Issued Patents 2020
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10865099 | MEMS device and method for forming the same | Chen-Hsiung Yang, Chun-Wen Cheng, En-Chan Chen | 2020-12-15 |
| 10850976 | Method of making ohmic contact on low doped bulk silicon for optical alignment | Kuei-Sung Chang, Shang-Ying Tsai | 2020-12-01 |
| 10779100 | Method for manufacturing a microphone | Jung-Huei Peng, Chun-Wen Cheng, Chin-Yi Cho, Li-Min Hung, Yao-Te Huang | 2020-09-15 |
| 10752497 | Semiconductor structure for MEMS device | Yu-Chia Liu, Chun-Wen Cheng, Jung-Huei Peng | 2020-08-25 |
| 10745271 | Method for integrating complementary metal-oxide-semiconductor (CMOS) devices with microelectromechanical systems (MEMS) devices using a flat surface above a sacrificial layer | Chun-Wen Cheng | 2020-08-18 |
| 10715924 | MEMS microphone having diaphragm | Chun-Wen Cheng, Chun-Yin Tsai | 2020-07-14 |
| 10689247 | Method and structure for CMOS-MEMS thin film encapsulation | Yu-Chia Liu, Chun-Wen Cheng | 2020-06-23 |
| 10618804 | Manufacturing method of semiconductor structure including heater | Chun-Wen Cheng, Fei-Lung Lai, Shiang-Chi Lin | 2020-04-14 |
| 10609463 | Integrated microphone device and manufacturing method thereof | Chun-Wen Cheng, Wen Cheng Kuo, Chun-Yin Tsai, Tzu-Heng Wu | 2020-03-31 |
| 10541627 | MEMS structure and method of forming same | Yi Heng Tsai, Kuei-Sung Chang | 2020-01-21 |
| 10526196 | Structure and formation method of semiconductor device structure | Yi-Chuan Teng, Chun-Yin Tsai, Chun-Wen Cheng | 2020-01-07 |