Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10843235 | Device for applying a liquid medium which is exposed to UV radiation to a substrate | Jörg Duda | 2020-11-24 |
| 10845718 | Holder for holding and for protecting a side of a photomask or a photomask or a photomask having pellicle from a cleaning medium, method for cleaning a photomask or a photomask with pellicle and device for opening and closing a holder | Jens Krümberg, Adem Beser | 2020-11-24 |
| 10722925 | Treatment head, treatment system and method for treating a local surface area of a substrate | Martin Samayoa | 2020-07-28 |