Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845718 | Holder for holding and for protecting a side of a photomask or a photomask or a photomask having pellicle from a cleaning medium, method for cleaning a photomask or a photomask with pellicle and device for opening and closing a holder | Jens Krümberg, Uwe Dietze | 2020-11-24 |