Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10865501 | Silicon carbide epitaxial substrate and method of manufacturing silicon carbide semiconductor device | Tsutomu Hori | 2020-12-15 |
| 10825903 | Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device | Keiji Wada, Tsutomu Hori | 2020-11-03 |
| 10811500 | Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device | Keiji Wada, Tsutomu Hori | 2020-10-20 |
| 10770550 | Silicon carbide epitaxial substrate having grooves extending along main surface and method of manufacturing silicon carbide semiconductor device | Keiji Wada, Taro Nishiguchi | 2020-09-08 |
| 10697086 | Method for manufacturing silicon carbide epitaxial substrate, method for manufacturing silicon carbide semiconductor device, and apparatus for manufacturing silicon carbide epitaxial substrate | Keiji Wada, Hideyuki Doi | 2020-06-30 |
| 10612160 | Epitaxial wafer and method for manufacturing same | Taro Nishiguchi, Jun Genba, Tomoaki Hatayama, Hideyuki Doi | 2020-04-07 |