Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10697086 | Method for manufacturing silicon carbide epitaxial substrate, method for manufacturing silicon carbide semiconductor device, and apparatus for manufacturing silicon carbide epitaxial substrate | Keiji Wada, Hironori Itoh | 2020-06-30 |
| 10612160 | Epitaxial wafer and method for manufacturing same | Taro Nishiguchi, Jun Genba, Hironori Itoh, Tomoaki Hatayama | 2020-04-07 |