Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10753363 | Monitoring device and vacuum pump | — | 2020-08-25 |
| 10711909 | Target opening degree estimator and pressure adjustment vacuum valve | — | 2020-07-14 |
| 10683867 | Vacuum valve, vacuum pump, and vacuum pumping system | Masaya Nakamura, Atsuo Nakatani, Nobuyuki Hirata | 2020-06-16 |
| 10683893 | Magnetic bearing device and vacuum pump | — | 2020-06-16 |
| 10634147 | Magnetic levitation vacuum pump | — | 2020-04-28 |
| 10619669 | Magnetic bearing control device and vacuum pump | — | 2020-04-14 |
| 10599166 | Valve control device | Nobuyuki Hirata, Atsuo Nakatani, Masaya Nakamura | 2020-03-24 |