Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10683867 | Vacuum valve, vacuum pump, and vacuum pumping system | Masaya Nakamura, Junichiro Kozaki, Nobuyuki Hirata | 2020-06-16 |
| 10599166 | Valve control device | Nobuyuki Hirata, Junichiro Kozaki, Masaya Nakamura | 2020-03-24 |