HX

Hongfa Xia

SC Shanghai Micro Electronics Equipment (Group) Co.: 1 patents #9 of 60Top 15%
Overall (2020): #445,770 of 565,922Top 80%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10732509 Knife edge set of mask aligner, large-view-field mask aligner, and exposure method Bin Wang, Xiaofeng Yang 2020-08-04