Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732509 | Knife edge set of mask aligner, large-view-field mask aligner, and exposure method | Xiaofeng Yang, Hongfa Xia | 2020-08-04 |
| 10649121 | Low Ts wire grid polarizer | Hua Li, Brian Bowers | 2020-05-12 |