SH

Shifeng He

S( Semiconductor Manufacturing International (Beijing): 2 patents #15 of 150Top 10%
S( Semiconductor Manufacturing International (Shanghai): 2 patents #21 of 173Top 15%
Overall (2020): #122,324 of 565,922Top 25%
2
Patents 2020

Issued Patents 2020

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10679881 Overlay measurement method and apparatus Qiang Wu, Xuan Liu, Jianyao Liu 2020-06-09
10658210 Apparatus and method for detecting overlay mark with bright and dark fields Qiang Wu 2020-05-19