Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10835932 | Substrate processing apparatus and substrate processing method | Takayuki Nishida, Junichi Ishii | 2020-11-17 |
| 10821483 | Substrate treatment apparatus | Wataru Yano | 2020-11-03 |
| 10665479 | Substrate treatment device and substrate treatment method | — | 2020-05-26 |