Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10835932 | Substrate processing apparatus and substrate processing method | Takayuki Nishida, Akio Hashizume | 2020-11-17 |
| 10685856 | Substrate processing method and substrate processing apparatus | Ryohei HOKAKU, Takashi Shinohara | 2020-06-16 |
| 10546763 | Substrate treatment method and substrate treatment device | Shotaro Tsuda | 2020-01-28 |