Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761031 | Arbitrary wavefront compensator for deep ultraviolet (DUV) optical imaging system | Qiang Zhang | 2020-09-01 |
| 10539512 | Block-to-block reticle inspection | Patrick LoPresti, Joe Blecher, Rui-fang Shi, Yalin Xiong, John Fielden | 2020-01-21 |