Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10860863 | Vision based target tracking using tracklets | Jinjun Wang, Shun Zhang | 2020-12-08 |
| 10634623 | Phase contrast monitoring for extreme ultra-violet (EUV) masks defect inspection | Qiang Zhang | 2020-04-28 |
| 10539512 | Block-to-block reticle inspection | Abdurrahman Sezginer, Patrick LoPresti, Joe Blecher, Yalin Xiong, John Fielden | 2020-01-21 |