Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10754254 | Extreme ultraviolet (EUV) exposure apparatus and method of manufacturing semiconductor device using the same | Keunhee Bai, Jinhong Park, Jinseok Heo, Heeyoung Go | 2020-08-25 |