Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10754254 | Extreme ultraviolet (EUV) exposure apparatus and method of manufacturing semiconductor device using the same | Jinhong Park, Jinseok Heo, Heeyoung Go, Seongchul Hong | 2020-08-25 |
| 10600653 | Method for forming a fine pattern | Jongchul Park, Seungjun Kim, Seungju Park, Young-Ju Park, Hak-Sun Lee | 2020-03-24 |