Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10829690 | Slurry composition for chemical mechanical polishing, method of preparing the same, and method of fabricating semiconductor device by using the same | Bo Yun Kim, Kenji Takai, Do Yoon Kim, Bo-Un Yoon | 2020-11-10 |
| 10711160 | Slurry compositions for polishing a metal layer and methods for fabricating semiconductor devices using the same | Seung Ho Park, Hyun Goo KONG, Jung Hun Kim, Sang Mi Lee, Woo In LEE +4 more | 2020-07-14 |