Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10711160 | Slurry compositions for polishing a metal layer and methods for fabricating semiconductor devices using the same | Seung Ho Park, Hyun Goo KONG, Jung Hun Kim, Sang Mi Lee, Hee Sook Cheon +4 more | 2020-07-14 |