Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10821572 | Method of controlling a temperature of a chemical mechanical polishing process, temperature control, and CMP apparatus including the temperature control | Suk-Hoon Jeong, Geun-Kyu Choi, Chang Sun Hwang, Tae Young Kwon, Young Sang Kim +2 more | 2020-11-03 |
| 10699169 | Machine learning-based object detection method and apparatus | Sun Ah KANG, Bo Youn Kim, Seong-Jong Ha | 2020-06-30 |