Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10821572 | Method of controlling a temperature of a chemical mechanical polishing process, temperature control, and CMP apparatus including the temperature control | Suk-Hoon Jeong, Sang Hak Lee, Geun-Kyu Choi, Chang Sun Hwang, Young Sang Kim +2 more | 2020-11-03 |