Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10557198 | Gas distribution apparatus and substrate processing apparatus including the same | Heon Bok Lee, Dae-Yong Kim, Dong Woo Kim, Sang Yub Ie, Sang-Jin Hyun | 2020-02-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10557198 | Gas distribution apparatus and substrate processing apparatus including the same | Heon Bok Lee, Dae-Yong Kim, Dong Woo Kim, Sang Yub Ie, Sang-Jin Hyun | 2020-02-11 |