Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714579 | Semiconductor devices including recessed source/drain silicides and methods of forming the same | Chul-Sung Kim, Sang-Jin Hyun | 2020-07-14 |
| 10557198 | Gas distribution apparatus and substrate processing apparatus including the same | Dae-Yong Kim, Dong Woo Kim, Jun Ki Park, Sang Yub Ie, Sang-Jin Hyun | 2020-02-11 |