Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770337 | Lift pin assembly, substrate support apparatus and substrate processing apparatus having the same | Seung Won SHIN, Su Ho Lee | 2020-09-08 |
| 10665490 | Apparatus and methods for edge ring replacement, inspection and alignment using image sensors | Keon Woo Kim, Sun Ho Kim, Eung Su Kim, Bo-Ra Yoon, Hyan-Jung Lee +1 more | 2020-05-26 |