Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770337 | Lift pin assembly, substrate support apparatus and substrate processing apparatus having the same | Ja Woo Lee, Su Ho Lee | 2020-09-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770337 | Lift pin assembly, substrate support apparatus and substrate processing apparatus having the same | Ja Woo Lee, Su Ho Lee | 2020-09-08 |