Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10779388 | EUV generation device | — | 2020-09-15 |
| 10733719 | Wafer inspection apparatus and wafer inspection method using the same | Tae-Heung Ahn, Soo Ryonng Kim, Tae-Joong Kim, Jun Bum Park, Jae Chol Joo | 2020-08-04 |