Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10625393 | Chemical mechanical polishing pads having offset circumferential grooves for improved removal rate and polishing uniformity | Bainian Qian, Julia Kozhukh | 2020-04-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10625393 | Chemical mechanical polishing pads having offset circumferential grooves for improved removal rate and polishing uniformity | Bainian Qian, Julia Kozhukh | 2020-04-21 |