Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10793428 | Sensor element having laser-activated getter material | Achim Breitling | 2020-10-06 |
| 10752498 | MEMS component having two different internal pressures | Achim Breitling, Eckhard Graf, Jens Frey, Jochen Reinmuth | 2020-08-25 |
| 10556789 | Laser resealing with stress-reducing prestructuring | Frank Reichenbach, Jochen Reinmuth, Philip Kappe | 2020-02-11 |