Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10775253 | Method for producing a micromechanical component with an exposed pressure sensor device and micromechanical component | Arne Dannenberg, Daniel Haug, Daniel Kaercher, Michaela Mitschke, Mike Schwarz +1 more | 2020-09-15 |
| 10766778 | Polycrystalline material having low mechanical strain; method for producing a polycrystalline material | Andreas Hartlieb, Jochen Beintner, Juergen Butz | 2020-09-08 |
| 10643896 | Method for producing at least one via in a wafer | Jochen Reinmuth, Markus Kuhnke, Stefan Majoni, Timo Schary | 2020-05-05 |