Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784082 | Apparatus for generating plasma and apparatus for treating substrate having the same | Geun-Young Yeom, Kyung Chae Yang, Hyun Woo TAK, Da In SUNG | 2020-09-22 |
| 10712317 | Apparatus for detecting defect and method for detecting defect using the same | Dong Hwan Shin, Seung Eun Cha | 2020-07-14 |