Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784082 | Apparatus for generating plasma and apparatus for treating substrate having the same | Geun-Young Yeom, Kyung Chae Yang, Hyun Woo TAK, Ye Ji SHIN | 2020-09-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784082 | Apparatus for generating plasma and apparatus for treating substrate having the same | Geun-Young Yeom, Kyung Chae Yang, Hyun Woo TAK, Ye Ji SHIN | 2020-09-22 |