Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867769 | Vacuum apparatus and charged particle beam writing apparatus | Keita Ideno, Hiroyasu Saito | 2020-12-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867769 | Vacuum apparatus and charged particle beam writing apparatus | Keita Ideno, Hiroyasu Saito | 2020-12-15 |