Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867769 | Vacuum apparatus and charged particle beam writing apparatus | Tetsuro Nishiyama, Hiroyasu Saito | 2020-12-15 |
| 10607810 | Vibration control system and optical equipment equipped therewith | Michihiro Kawaguchi, Kiminobu Akeno, Kiyoshi Nakaso, Shintaro Yamamoto, Keisuke Goto +4 more | 2020-03-31 |