Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816332 | Pattern measurement device and pattern measurement method | Hiroya Ohta, Tomohiro Tamori, Takuma Yamamoto | 2020-10-27 |
| 10636618 | Charged particle beam apparatus | Kaori Bizen, Yasunari Sohda, Makoto Sakakibara, Hiroya Ohta, Yusuke Abe | 2020-04-28 |
| 10629408 | Charged particle beam device | Toshimasa Kameda, Hiroya Ohta | 2020-04-21 |