Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10720334 | Selective cyclic dry etching process of dielectric materials using plasma modification | René Henricus Jozef Vervuurt, Nobuyoshi Kobayashi, Takayoshi Tsutsumi | 2020-07-21 |
| 10720337 | Pre-cleaning for etching of dielectric materials | René Henricus Jozef Vervuurt, Nobuyoshi Kobayashi, Takayoshi Tsutsumi | 2020-07-21 |
| 10577719 | Radical generator and molecular beam epitaxy apparatus | Hiroshi Amano, Hiroyuki Kano, Shoji Den, Koji Yamakawa | 2020-03-03 |