Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10720334 | Selective cyclic dry etching process of dielectric materials using plasma modification | Nobuyoshi Kobayashi, Takayoshi Tsutsumi, Masaru Hori | 2020-07-21 |
| 10720337 | Pre-cleaning for etching of dielectric materials | Nobuyoshi Kobayashi, Takayoshi Tsutsumi, Masaru Hori | 2020-07-21 |