Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866510 | Overlay improvement in nanoimprint lithography | Anshuman Cherala, Byung-Jin Choi | 2020-12-15 |
| 10578984 | Adaptive chucking system | Anshuman Cherala, Byung-Jin Choi | 2020-03-03 |
| 10553501 | Apparatus for use in forming an adaptive layer and a method of using the same | Anshuman Cherala | 2020-02-04 |
| 10534259 | Method and system for imprint force control | Byung-Jin Choi | 2020-01-14 |